ITE and WrUT Workshop on MOEMS on Feb. 2017

Bilateral ITE and Wroclaw University of Technology Workshop on Micro-Optical MEMS took place in ITE labs on February 15-16 2017.

The 2-days Workshop was organized at ITE labs (Division of Silicon Microsystem and Nanostructure Technology). Over 15 participants from both institutions took part in the Workshop. During the Workshop the MEMS/MOEMS metrology and Lab4MEMS-II project related topics were presented and discussed. Students attending the Workshop had an unique opportunity to “touch” a real MEMS/MOEMS devices and perform set of experiments on sensors systems set-up in ITE labs. The demonstration of MEMS/NEMS/MOEMS devices developed within LAB4MEMS-II was performed. At the end of the second day of the event, the lab tour at ITE clean-room facility was organized.

The list of presentations during the first workshop day:

• Lab4MEMS-II project and cooperation between ITE and WrUT, Tomasz Bieniek
• Introduction to metrology of and with MEMS/NEMS devices, Teodor Gotszalk
• 18-bits acquisition & processing card for MEMS/NEMS/MOEMS sensor systems, Tomasz Piasecki
• Acquisition system for micro-cantilevers array based sensor systems, Mateusz Gramala
• Control and actuation of micro-cantilever arrays, Wojciech Majstrzyk
• Micro-cantilever beams – calculation, characterization and analysis, Karolina Orłowska