Dissemination

Lab4MEMS II dissemination in 2017:

“Recent Advancements and Perspectives in MEMS and MOEMS Technologies” Luca Zanotti, Invited Lecture presented at “Institute of Sensor and Actuator Systems, “Micro-and Nano-systems” Course, TU Wien, January 13th Technical University Wien, Austria (ST-I);
ToolKit: “Testing MEMS”, Farrugia R. Portelli B., Technical Article presented in THINK magazine January 2017, Malta (University of Malta);
“Theoretical and Finite Element Analysis of Dynamic Deformation in Resonating Micromirrors”, Farrugia R., Camilleri D., Grech I., Casha, O., Micallef J., Gatt E., Journal Paper accepted for publication in Microsystem Technologies (University of Malta);
“VTT’s Fabry-Perot interferometer technologies for hyperspectral imaging and mobile sensing applications”, Anna Rissanen, Bin Guo, Heikki Saari, Antti Näsilä, Rami Mannila, Altti Akujärvi, Harri Ojanen, Invited presentation, to be presented at SPIE Photonics West 2017 OPTO MOEMS and Miniaturized Systems XVI, San Francisco, California, United States, 30 January - 1 February 2017 (VTT);
“Advanced protective coatings by low temperature atomic layer deposition on Al surfaces for micromirror applications”, C. Wiemer, E. Cianci, A. Lamperti, G. Tallarida, M. Zanuccoli, C. Fiegna, L. Lamagna, S. Losa, S. Rossini, F. Vercesi, Oral presentation to be presented at EUROCVD-Baltic ALD conference Euroi CVD Baltic ALD conference, Linkoping, June 11-14 2017 (CNR-IMM-MDM);
“Advanced protective coatings by low temperature atomic layer deposition of HfO2 on Al surfaces for micro-mirror applications”, C. Wiemer, E. Cianci, A. Lamperti, G. Tallarida, M. Zanuccoli, C. Fiegna, L. Lamagna, S. Losa, S. Rossini, F. Vercesi, scientific Article submitted to Sensors and Actuators Journal (CNR-IMM-MDM);
"Cu-Sn-Pt metallurgy for SLID", A. Rautiainen, V. Vuorinen, M. Paulasto-Kröckel; Journal TBD, 2017 (Aalto University);
“XRD and ToF-SIMS study of intermetallic void formation in Cu-Sn micro-connects”, G. Ross, V. Vuorinen, M. Krause, S. Reissaus, M. Petzold, M. Paulasto-Kröckel, ESREF 2017The 28^th European Symposium on Reliability of Electron Devices, Failure Physics and Analysis, Sept. 25-28 Bordeaux, France (Aalto University, Presentation);

"Long-term Stresses on Linear Micromirrors for Pico Projector Application", M. Silvestrini, M. Barbato, S. Costantini, F. Vercesi, L.Castoldi, L. Zanotti, G. Meneghesso, ESREF 2017 - European Symposium on Reliability on Electron Devices Physics and Analysis, September 25-29, Bordeaux, France, https://esref2017.sciencesconf.org/ (ST-I);
"Long-term Stresses on Linear Micromirrors for Pico Projector Application", Silvestrini M., Barbato M., Costantini S., Vercesi F., Castoldi L., Zanotti L., Meneghesso G., Microelectronics Reliability, Volumes 76–77, 2017, Pages 626-630, ISSN 0026-2714, https://doi.org/10.1016/j.microrel.2017.07.081 (Journal paper, ST-I);
"XRD and ToF-SIMS study of intermetallic void formation in Cu-Sn micro-connects", G.Ross, V. Vuorinen, M. Krause, S. Reissaus, M. Petzold, M. Paulasto-Kröckel, ESREF 2017 - European Symposium on Reliability on Electron Devices Physics and Analysis, September 25-29, Bordeaux, France, https://esref2017.sciencesconf.org/ (Aalto University);
"XRD and ToF-SIMS study of intermetallic void formation in Cu-Sn micro-connects", G.Ross, V. Vuorinen, M. Krause, S. Reissaus, M. Petzold, M. Paulasto-Kröckel, Microelectronics Reliability Volumes 76–77, September 2017, Pages 390-394, https://doi.org/10.1016/j.microrel.2017.07.044 (Journal paper, Aalto University);
"Design optimization of a high frequency resonating micro-mirror with low dynamic deformation", Farrugia R., Camilleri D., Grech I., Casha, O.,Micallef J., Gatt E., DTIP 2017 - Design,Test, Integration & Packaging of MEMS/MOEMS, May 29 - June 1, Bordeaux, France (University of Malta);
"Design optimization of a high frequency resonating micro-mirror with low dynamic deformation", Farrugia R., Camilleri D., Grech I., Casha, O.,Micallef J., Gatt E., Conference Paper at DTIP 2017 - Design,Test, Integration & Packaging of MEMS/MOEMS, May 29 - June 1, Bordeaux, France, DOI: 10.1109/DTIP.2017.7984467 (Paper, University of Malta);
"Capacitance measurement techniques in MOEMS angular vertical comb-drive actuators", B.Portelli, Farrugia R., Grech I., Casha, O.,Micallef J., Gatt E., DTIP 2017 - Design,Test, Integration & Packaging of MEMS/MOEMS, May 29 - June 1, Bordeaux, France (University of Malta);
"Capacitance measurement techniques in MOEMS angular vertical comb-drive actuators", B.Portelli, Farrugia R., Grech I., Casha, O.,Micallef J., Gatt E., DTIP 2017 - Design,Test, Integration & Packaging of MEMS/MOEMS, May 29 - June 1, Bordeaux, France, DOI: 10.1109/DTIP.2017.7984455, (Paper, University of Malta);
"Application of a computational efficient RCWA method for the simulation of micro-mirrors in optical MEMS", M. Zanuccoli , C. Fiegna, I. Semenikhin, E. Cianci, C. Wiemer, A. Lamperti and G. Tallarida, L. Lamagna, S. Losa, S. Rossini, F. Vercesi, oral presentation and conference paper to be presented at SISPAD2017 International Conference on Simulation of Semiconductor Processes and Devices (SISPAD), Kamakura, Japan, September 7-9 2017, (CNR-IMM-MDM);
"Lab4MEMS II", L.Zanotti, Poster presented at ECSEL SYMPOSIUM, June 13-14th 2017, Malta (ST-I)
"Semiconductor Technology for Internet of Things", R. Zafalon, Invited Speech presented at ECSEL SYMPOSIUM, June 13-14th 2017, Malta (ST-I);
"Multi-Cantilever Array Sensor System with MOEMS Read-Out", Bieniek T., Janus P., Majstrzyk W., Gotszalk T., Janczyk G., poster presented and NanoTech2017 TechConnect World Innovation, Conference & Expo NanoTech 2017, Waszyngton, USA, 14-17.05.2017 (ITE);
"Multi-Cantilever Array Sensor System with MOEMS Read-Out", Bieniek T., Janus P., Majstrzyk W., Gotszalk T., Janczyk G., Conference Paper, NanoTech2017 Informatics, Electronics and Microsystems TechConnect Briefs 2017, Nanoelectronics Chapter 3, 2017, pp. 92-95 (ITE);
"Lab4MEMS-II Project: Innovative Multi-Cantilever Sensor System with MOEMS Read-Out", T. Bieniek, P. Janus, J. Zając, W. Majstrzyk, T. Gotszalk, Poster presented at EuroNanoForum 2017, Valetta, Malta, 21-23.06.2017, Best Poster Award (ITE);
"Nanotechnologies applications for electronics", R.Zafalon, Sessione Presentation Speech at EuroNanoForum 2017, Valetta, Malta, 21-23.06.2017 (ST-I);
"Finite Element Analysis in the Design and Packaging of MEMS devices", R. Farrugia, Session Presentation presented at SmartMemphis Summer School, Smart Systems Integration Master Class, 27.06.2017 (University of Malta);
"Modeling, Characterization Facilities and Research at the University of Malta", B. Portelli, Session Presentation presented at SmartMemphis Summer School, Smart Systems Integration Master Class, 27.06.2017 (University of Malta);
“Interfacial void segregation of Cl in Cu-Sn micro-connects”, G. Ross, X. Tao, M. Broas, N. Mäntyoja, V. Vuorinen, A. Graff, F. Altmann, M. Petzold, and M. Paulasto-Kröckel, Electron. Mater. Lett. (2017) 13: 307. https://doi.org/10.1007/s13391-017-6304-5 (Journal Paper, Aalto University);
“Vertical cracking of Cu-Sn solid-liquid interdiffusion bond under thermal shock test”, A. Rautiainen, V. Vuorinen, M. Paulasto-Kröckel; Materials Today Proceedings, Volume 4, Issue 7, Part 2, 2017, Pages 7093-7100, https://doi.org/10.1016/j.matpr.2017.08.002 (Journal paper, Aalto University);
“GHz-SAM analysis of Cu-Sn interfacial voiding”, G.Ross, S.Brand, V.Vuorinen, M. Petzold and M. Paulasto-Kröckel, Applied Physics Letters 110(5):054102 January 2017, DOI: 10.1063/1.4975305 (Journal paper, Aalto University);
“Lab4MEMS II”, Zafalon R., Zanotti L., Poster presented at EFECS 2017 European Forum for Electronic Components and Systems, Brussels, Belgium, 05 December 2017 (Poster, ST-I);
“Technological Application Fields for MEMS Sensors and Actuators”, Zanotti L. Sanginario A., Invited Speech presented at 2^nd Lab4MEMS2 Workshop “Next-Generation MEMS/MOEMS Technologies and Devices” at joined Semicon Europa 2017 and Productronica 2017 conferences and exhibitions, 15 Nov. 2017 (Invited Speech, ST-I);
“SOI based platforms for next generation MEMS manufacturing”, Vesa-Pekka Lempinen, Invited Speech presented at 2^nd Lab4MEMS2 Workshop “Next-Generation MEMS/MOEMS Technologies and Devices” at joined Semicon Europa 2017 and Productronica 2017 conferences and exhibitions, 15 Nov. 2017 (Invited Speech, Okmetic);
“Design for manufacturability and reliability of metal bonding for wafer-level MEMS packaging”, V. Vuorinen, H. Viljanen, G. Ross, J. Dekker, M. Paulasto-Kröckel, Invited Speech presented at 2^nd Lab4MEMS2 Workshop “Next-Generation MEMS/MOEMS Technologies and Devices” at joined Semicon Europa 2017 and Productronica 2017 conferences and exhibitions, 15 Nov. 2017 (Invited Speech, Aalto, VTT);
“Next generation micro-optical MEMS micro-mirrors and pico-projectors – LAB4MEMS-II project”, T. Bieniek, P. Grabiec, P. Janus, J. Zając, G. Janczyk, 2^nd Lab4MEMS2 Workshop “Next-Generation MEMS/MOEMS Technologies and Devices” at joined Semicon Europa 2017 and Productronica 2017 conferences and exhibitions, 15 Nov. 2017 (Poster, ITE);
“Lab4MEMS-II project: Innovative multi-cantilever sensor system with MOEMS read-out”, T. Bieniek, P. Janus, J. Zając, P. Grabiec, W. Majstrzyk, T. Gotszalk, G. Janczyk, 2^nd Lab4MEMS2 Workshop “Next-Generation MEMS/MOEMS Technologies and Devices” at joined Semicon Europa 2017 and Productronica 2017 conferences and exhibitions, 15 Nov. 2017 (Poster, ITE);
“Motori del micromondo tra presente e future” Luca Pellegrino, Teuro Kanki, Luca Zanotti, Festival della Scienza 2017 Genova, Italy, 30 Oct. 2017 (Presentation, ST-I);
Lab4MEMS2 activities were presented by Prof. Demarchi at Politecnico di Torino during academic year 2016/2017, on 9 January 2017, in the class of “CAD for Microsystems” (74 students) for the Master Degrees of Electronics Engineering and Nanotechnologies for ICT, focusing on the use of Comsol for micromirror design (Lecture, Polito);
During academic year 2016/2017, on 27 March 2017, Prof. Demarchi presented Lab4MEMS2 in the class of “Bio-Micro&Nano Systems” (268 students) for the Master Degrees of Electronics and Biomedical Engineering, describing the simulation techniques and the needed processes for the micromirror design and fabrication (Lecture, Polito);
“Development of a resonant asymmetric micro mirror using an electro active polymer actuation”, F. Casset, P. Poncet, B. Desloges, B. Neff, F. Domingues Dos Santos, JS. Danel, M. Vimercati, L. Zanotti, S. Fanget, Conference Paper presented at MME 2017, 28^th Micromechanics and Microsystems Europe Workshop 2017, Uppsala, Sweden (Presentation, CEA, Arkema, ST-I);
“Science in the City Documentary on National Television”, Farrugia R., Interview, 28th Sept, University of Malta, https://www.youtube.com/watch?v=0L_Wxuvz3qY&t=783s, (TV material, University of Malta);
“UoM Micro- and Nano- Technology Research”, Portelli B., ENF 2017, June 20-22, Valletta (Poster, University of Malta);
“Lab4MEMS-II project and cooperation between ITE and WrUT”, Tomasz Bieniek, Workshop on Micro-Optical MEMS between ITE and Wroclaw University of Technology organized at ITE on February 15-16 2017 (Presentation, ITE);
“Introduction to metrology of and with MEMS/NEMS devices”, Teodor Gotszalk, Workshop on Micro-Optical MEMS between ITE and Wroclaw University of Technology organized at ITE on February 15-16 2017 (Presentation, WrUT);
“18-bits acquisition & processing card for MEMS/NEMS/MOEMS sensor systems”, Tomasz Piasecki, Workshop on Micro-Optical MEMS between ITE and Wroclaw University of Technology organized at ITE on February 15-16 2017 (Presentation, WrUT);
“Acquisition system for micro-cantilevers array based sensor systems”, Mateusz Gramala, Workshop on Micro-Optical MEMS between ITE and Wroclaw University of Technology organized at ITE on February 15-16 2017 (Presentation, WrUT);
“Control and actuation of micro-cantilever arrays”, Wojciech Majstrzyk, Workshop on Micro-Optical MEMS between ITE and Wroclaw University of Technology organized at ITE on February 15-16 2017 (Presentation, WrUT);
“Micro-cantilever beams – calculation, characterization and analysis”, Karolina Orłowska, Workshop on Micro-Optical MEMS between ITE and Wroclaw University of Technology organized at ITE on February 15-16 2017 (Presentation, WrUT);
A. Cilea, Geometric optimization of electromagnetically actuacted MEMS micromirrors, M. Sc. Thesis in Electronic Engineering, University of Pisa, 2017, (University of Pisa, IUNET);
M. Silvestrini, MEMS Micromirrors: Overview of the Characterization Systems, Dynamic Deformation and Reliability Analysis, M. Sc. Thesis in Electronic Engineering, University of Padua, 2017, (University of Padua, IUNET);
SEMICON Taiwan, September 2017, Taipei, Taiwan (KLA-Tencor, Exhibition);
“Parametric resonance in electrostatically actuated micromirrors”, A Frangi, A Guerrieri, R Carminati, G Mendicino, IEEE Transactions on Industrial Electronics 64 (2), 1544-1551, 2017 (Journal paper, Politecnico di Milano);
“Accurate Simulation of Parametrically Excited Micromirrors via Direct Computation of the Electrostatic Stiffness”, A Frangi, A Guerrieri, N Boni, Sensors 17 (4), 779, 2017; (Journal paper, Politecnico di Milano);