Project overview

Lab4MEMS II will feature the Pilot Line for innovative technologies on advanced Micro-Opto-Electro-Mechanical Systems (MOEMS). This is not just a special class of MEMS systems in fact, but it deals with MEMS merged with Micro-optics, which involves sensing or manipulating optical signals on a very small size scale, using integrated mechanical, optical, and electrical systems. MOEMS includes a variety of devices including optical switch, array of micro-mirrors, optical cross-connect, lasers and micro lens amongst others. These devices are usually fabricated using micro-optics and standard micromachining technologies using materials like silicon, molybdenum (Mo), silicon dioxide, silicon nitride (Si₃N₄), piezo coating, etc…

The key findings, including MOEMS sensor’s process, design, methodology and manufacturing will be established and evaluated by means of highly impacting technology demonstrators and use-cases.

The Demonstration strategy of Lab4MEMS II is two-fold:

• A suite of "proof-of-concepts" will be delivered and assessed at midterm as intermediate demonstration vehicles to prove the actual feasibility of initial device solutions, wafer substrates, process steps, tools or equipment.
• The work-flow will then converge and optimize the set of four Final Technology Demonstrators intended to become the flagship test vehicles to demonstrate the Lab4MEMS II KET Pilot Line.